This letter reports low-field wide-tunable interdigitated barium strontium titanate (BST) capacitors. The capacitors consisting of BST thin film dielectric, silicon substrate, and gold metallization have been fabricated. The capacitance exhibits 0.2 pF at zero-bias and shows a tunability of 63 % with an applied electric field of 1.4 V / μm. This corresponds to a 3.5 μm electrode gap width and a 5 V dc bias. Microwave measurements reveal a zero bias film quality of 50 around 30 GHz.
- Barium strontium titanate (BST)
- Thin film
- Tunable circuit
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering