Influence of experimental parameters on physical properties of porous silicon and oxidized porous silicon layers

J. Charrier, V. Alaiwan, P. Pirasteh, A. Najar, M. Gadonna

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)

Abstract

This paper reports physical properties of porous silicon and oxidized porous silicon, manufactured by anodisation from heavily p-type doped silicon wafers as a function of experimental parameters. The growth rate and refractive index of the layers were studied at different applied current densities and glycerol concentrations in electrolyte. When the current density varied from 5 to 100 mA/cm 2 , the refractive index was between 1.2 and 2.4 which corresponded to a porosity range from 42 to 85%. After oxidation, the porosity decreased and was between 2 and 45% for a refractive index range from 1.22 to 1.46. The thermal processing also induced an increase in thickness which was dependent on the initial porosity. This increase in thickness was more important for the lowest porosities. Lastly, the roughness of the porous layer/silicon substrate interface was studied at different applied current densities and glycerol concentrations in solution. Roughness decreased when the current density or glycerol concentration increased. Moreover, roughness was also reduced by thermal oxidation.

Original languageEnglish
Pages (from-to)8632-8636
Number of pages5
JournalApplied Surface Science
Volume253
Issue number21
DOIs
Publication statusPublished - Aug 31 2007
Externally publishedYes

Keywords

  • Composition of electrolyte
  • Growth rate
  • Porosity
  • Porous silicon
  • Refractive index
  • Roughness
  • Thermal oxidation

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Fingerprint

Dive into the research topics of 'Influence of experimental parameters on physical properties of porous silicon and oxidized porous silicon layers'. Together they form a unique fingerprint.

Cite this