Fabrication and characterization of aluminum nitride nanoparticles by RF magnetron sputtering and inert gas condensation technique

Ishaq Musa, Naser Qamhieh, Khadija Said, Saleh T. Mahmoud, Hussain Alawadhi

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

Aluminum nitride nanoparticles (AlN-NPs) were fabricated by a RF magnetron sputtering and inert gas condensation technique. By keeping the source parameters and sputtering time of 4 h fixed, it was possible to produce AlN-NPs with a size in the range of 2-3 nm. Atomic force microscopy (AFM), Raman spectroscopy, X-ray diffraction (XRD), and UV-visible absorption were used to characterize the obtained AlN-NPs. AFMtopography images showed quazi-sphere nanoparticles with a size ranging from 2 to 3 nm. The XRD measurements confirmed the hexagonal wurtzite structure of AlN nanoparticles. Furthermore, the optical band gap was determined by the UV-visible absorption spectroscopy. The Raman spectroscopy results showed vibration transverse-optical modes A1(TO), E1(TO), as well as longitudinal-optical modes E1(LO), A1(LO).

Original languageEnglish
Article number411
JournalCoatings
Volume10
Issue number4
DOIs
Publication statusPublished - Apr 1 2020

Keywords

  • AlN nanoparticles
  • Atomic force microscopy
  • RF magnetron sputtering
  • Raman spectroscopy
  • UV-visible absorption

ASJC Scopus subject areas

  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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