Capacitance force piezoelectric extraction

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The functionality of the piezoelectric materials is being used in many integrated applications due to their electrical-mechanical reciprocity. Here we have demonstrated that piezoelectric film coefficient can be characterized using capacitance force direct relationship. The proposed technique makes such determination by taking the measuring the capacitance of a piezoelectric disk with the application of mechanical force under a set of assumptions in deriving the equations for the d33 coefficient. Both; the classical parallel plate capacitance analysis and piezoelectric material theory are used to calculate the capacitance variation in lead zirconate titanate (PZT) film, enabling piezoelectric coefficient to be determined. The technique fits well sheet characterization avoiding any complicated preparation and uses arbitrary sample geometry. The values of the coefficients obtained experimentally are found to be similar to those that have been determined by more elaborate methods.

Original languageEnglish
Title of host publication2015 Joint IEEE International Symposium on the Applications of Ferroelectric, International Symposium on Integrated Functionalities and Piezoelectric Force Microscopy Workshop, ISAF/ISIF/PFM 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages253-256
Number of pages4
ISBN (Electronic)9781479999743
DOIs
Publication statusPublished - Jul 29 2015
EventJoint IEEE International Symposium on the Applications of Ferroelectric, International Symposium on Integrated Functionalities and Piezoelectric Force Microscopy Workshop, ISAF/ISIF/PFM 2015 - Singapore, Singapore
Duration: May 24 2015May 27 2015

Publication series

Name2015 Joint IEEE International Symposium on the Applications of Ferroelectric, International Symposium on Integrated Functionalities and Piezoelectric Force Microscopy Workshop, ISAF/ISIF/PFM 2015

Other

OtherJoint IEEE International Symposium on the Applications of Ferroelectric, International Symposium on Integrated Functionalities and Piezoelectric Force Microscopy Workshop, ISAF/ISIF/PFM 2015
Country/TerritorySingapore
CitySingapore
Period5/24/155/27/15

ASJC Scopus subject areas

  • Instrumentation
  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials

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