Avalanche double photodiode in 40-nm standard CMOS technology

Mohamed Atef, Andreas Polzer, Horst Zimmermann

Research output: Contribution to journalArticlepeer-review

31 Citations (Scopus)

Abstract

This paper investigates a silicon (Si) avalanche double photodiode (ADPD) fabricated in 40-nm standard CMOS technology. Two different types of double photodiodes (DPDs) will be introduced. The first one is a P-well/deep-N-well/P- substrate(PW/DNW/P-substrate) DPD, and the second one is a P+/N-well/ P-substrate P+/NW/P-substrate) DPD. The basic structure of the proposed ADPD is formed by P+/NW and NW/P-substrate junctions in which the avalanche effect occurs at the P+/NW junction. The P +/NW/P-substrate ADPD demonstrates responsivity of 0.84 A/W and a 3-dB electrical bandwidth of 0.7 GHz at 850 nm. For 660 nm, the ADPD shows a responsivity of 0.49 A/W with an electrical bandwidth of 1.8 GHz. For 520 nm, a responsivity of 2.04 A/W and an electrical bandwidth of 1.4 GHz are achieved.

Original languageEnglish
Article number6459520
Pages (from-to)350-356
Number of pages7
JournalIEEE Journal of Quantum Electronics
Volume49
Issue number3
DOIs
Publication statusPublished - 2013
Externally publishedYes

Keywords

  • Avalanche photodiodes
  • double photodiodes (DPD)
  • nanometer CMOS process
  • silicon photodiodes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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