A capacitive pressure sensor for MEMS

Amita Gupta, Amir Ahmad, Ranvir Singh

Research output: Contribution to journalConference articlepeer-review

13 Citations (Scopus)

Abstract

Pressure sensors have widespread applications in medicine and automotive industry. Specific designs and mounting arrangements vary considerably, ranging from small, sensitive catheter-tip transducers used within the heart to the bigger, rugged devices needed for industrial process control. A capacitive type of pressure sensor has been made using bulk silicon micromachining. It converts the diaphragm deformation, corresponding to pressure, into a change of capacitance. The total change in capacitance is the integral of the change of capacitance of each small area on the diaphragm. The change of capacitance δC/C is measured as a function of deformation or pressure. The diaphragm deflection has been modelled using Intellisuite software.

Original languageEnglish
Pages (from-to)450-454
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5062
Issue number1
Publication statusPublished - 2002
Externally publishedYes
EventSmart Materials, Structures, and Systems - Bangalore, India
Duration: Dec 12 2002Dec 14 2002

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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